Date: 2013-08-01

Miniature Piezo Motor Positioners use crossed-roller bearings

Driven by stick-slip-type and piezo-stepping-type linear motors, LPS Series achieves resolutions in low nanometer range and below. Smallest model in series measures 20 x 23 x 10 mm, while largest member features travel ranges of ½ and 1 in. and employs synchronized piezo stepping motor for forces to 10 N. Integrated linear encoder provides 0.5 nm resolution. In addition to single-axis stages, XY combinations and SpaceFAB parallel positioning design with 6

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